Brooks Automation Inc
 $892,804 Entegris Inc
 $2,090,179 KMG Chemicals Inc
 $0 Ecovyst Inc
 $3,040,407 Brooks Automation Inc
 $892,804 Entegris Inc
 $2,090,179 KMG Chemicals Inc
 $0 Ecovyst Inc
 $3,040,407