Axcelis Technologies Inc
 $4,361,601 Keycorp
 $3,811,972 Eaton Corp
 $155,845,102 Dowdupont Inc.
 $1,958,743 Axcelis Technologies Inc
 $4,361,601 Keycorp
 $3,811,972 Eaton Corp
 $155,845,102 Dowdupont Inc.
 $1,958,743