KLA-Tencor Corp $50,729,233 Electroglas Inc $0 CaLamp Corp $2,625 Mellanox Technologies, Ltd. $23,964 Hercules Technology Growth Capital Inc $168,962 Cohu Inc $1,089,937 Axcelis Technologies Inc $1,361,545 Formfactor Inc $874,877 Ichor Holdings Ltd $494,289 KLA-Tencor Corp $50,729,233 Electroglas Inc $0 CaLamp Corp $2,625 Mellanox Technologies, Ltd. $23,964 Hercules Technology Growth Capital Inc $168,962 Cohu Inc $1,089,937 Axcelis Technologies Inc $1,361,545 Formfactor Inc $874,877 Ichor Holdings Ltd $494,289