Axcelis Technologies Inc
 $3,853,570 Keycorp
 $3,932,379 Eaton Corp
 $165,485,364 Dowdupont Inc.
 $1,930,787 Axcelis Technologies Inc
 $3,853,570 Keycorp
 $3,932,379 Eaton Corp
 $165,485,364 Dowdupont Inc.
 $1,930,787