KLA-Tencor Corp $51,783,828 Electroglas Inc $0 CaLamp Corp $2,625 Mellanox Technologies, Ltd. $23,964 Hercules Technology Growth Capital Inc $167,838 Cohu Inc $1,077,370 Axcelis Technologies Inc $1,381,307 Formfactor Inc $874,877 Ichor Holdings Ltd $488,001 KLA-Tencor Corp $51,783,828 Electroglas Inc $0 CaLamp Corp $2,625 Mellanox Technologies, Ltd. $23,964 Hercules Technology Growth Capital Inc $167,838 Cohu Inc $1,077,370 Axcelis Technologies Inc $1,381,307 Formfactor Inc $874,877 Ichor Holdings Ltd $488,001